| 摘要 |
PROBLEM TO BE SOLVED: To form a rigid and inexpensive sensor capable of highly accurately measuring the acceleration in an axis under difficult condition by constituting a light reflecting surface (mirror) on a thin piece of a block being a vibration receiving element. SOLUTION: A material equal to that of a block 10 made of glass ceramic having a coefficient of thermal expansion of 0.1×10<-6> or less is cut and subjected to reflection treatment for forming a light-weighted disk whose diameter is larger than a hole 12 of a thin piece 11 of the block 10 and thickness is thinned to approximately 250μm for example, and the disk is adhered on the thin piece 11 to constitute a light reflecting surface (mirror) 13. Then, after ends of peeling coats of transmission and reception optical fibers F1 , F2 are received in a cylindrical cavity recessed in the block 10 coaxially with the mirror 13, the block 10 is adhered in an airtight casing. Thus, an appropriate sensor which can measure vibration of an output rod under severe use conditions can be obtained. In addition, since the optical fibers F1 , F2 are mutually separated for transmission and reception, the sensor is free from limitation due to their lengths and noise reflection.
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