METHOD OF MAKING SEMICONDUCTOR DEVICES USING ACOUSTIC VIBRATION,申请号JP19760038341-传众专利搜索

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发明名称	METHOD OF MAKING SEMICONDUCTOR DEVICES USING ACOUSTIC VIBRATION
摘要
申请公布号	JPS52123169(A)	申请公布日期	1977.10.17
申请号	JP19760038341	申请日期	1976.04.07
申请人	IBM	发明人	GUENTAA EICHI SHIYUUUKE;KUEIISHIYU YAN
分类号	H01L21/322;H01L21/304	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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