| 摘要 |
A wafer carrier handling apparatus comprises first and second pairs of jaws 22a, 22b, 24a, 24b. The first pair of jaws 22a, 22b is arranged to grasp the lid 46 of a container 44 while the second pair of jaws is arranged to grasp a carrier 48 disposed in the container. A vertically extending column 18 which supports the jaws is adapted to be moved laterally along a predetermined path to transfer a carrier 48 and lid 46 from a table 12 to a table 14. A controller is provided so as to lift and lower the first and second pairs of jaws along the column 18, and a jaw controller is provided so as to selectively and independently open and close the first and second pairs of jaws. A carrier 48 can thus be lifted out of a container 44 on table 12 and transferred with lid 46 to table 14, the lid 46 being subsequently returned to the table 12 and refitted to the container. |
