| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an analytical method, for the surface of an insulator, which prevents the insulator from being charged with electricity and in which a precise analysis can be performed. SOLUTION: An insulator 3 is installed on a sample base 17 inside a surface analyzer, and the surface of the insulator 3 is analyzed by an electron spectroscopic method. At this time, a part 3a, to be analyzed, at the insulator 3 is covered with a mask piece 5 which is attached at the upper part of the sample base 17, and a metal vapor-deposited film 4 is formed on an uncovered face 3b at the insulator 3 by using a vapor deposition device 6 installed inside the surface analyzer. Thereby, since the insulator 3 is not exposed to the air, the metal vapor-deposited film 4 is not oxidized, and the removal effect of electrification of the insulator 3 can be maintained in a good state.</p> |
