METHOD AND DEVICE FOR MANUFACTURING OPTICAL RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To produce a further stabilized film, speed up the film forming rate and prevent electrolytic corrosion of the coolant passage in a sputtering device for optical recording medium which uses cooling water. SOLUTION: Where a film is formed by impressing a high voltage supplied from a high-frequency power source 11 on a target 7 to form a sputtered film on a substrate 6 for optical recording medium, pure water whose electric conductivity is within 500μS/cm is used as the cooling water 16 cooling the target 7 and/or the cooling water flowing in the water-cooling coil installed in a high voltage impressing circuit.