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发明名称
Photochemischer Säurebildner für mikroelektronische Photoresists
摘要
申请公布号
DE69402592(T2)
申请公布日期
1997.07.24
申请号
DE19946002592T
申请日期
1994.01.06
申请人
MORTON INTERNATIONAL, INC., CHICAGO, ILL., US
发明人
KOES, THOMAS A., RIVERSIDE, CALIFORNIA 92503, US
分类号
C07C309/71;C07C309/76;C09K3/00;G03F7/004;G03F7/022;G03F7/031;G03F7/039;G03F7/26;H01L21/027;(IPC1-7):G03F7/022;C07C205/19
主分类号
C07C309/71
代理机构
代理人
主权项
地址
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