Scanning exposure apparatus and exposure method using the same,申请号EP19960305399-传众专利搜索

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发明名称	Scanning exposure apparatus and exposure method using the same
摘要
申请公布号	EP0756206(A3)	申请公布日期	1997.06.25
申请号	EP19960305399	申请日期	1996.07.23
申请人	CANON KABUSHIKI KAISHA	发明人	MURAKAMI, EIICHI;SAKAI, FUMIO;UZAWA, SHIGEYUKI;OGAWA, SHIGEKI;MORI, TETSUYA
分类号	G03F7/20;G03F9/00;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
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