发明名称 Semiconductor device comprising a photodiode and a bipolar element, and method of fabrication
摘要 In a light receiving element and a semiconductor device manufacturing method, the low density PN junction is formed by constructing the internal composition of the photodiode with N<+> type diffusion layer, N<-> type epitaxial layer, P<-> type epitaxial layer, P<+> type deposit layer, and P type Si from the light receiving surface, the vacant layer to be occurred when the photodiode is reverse biased will be widened and the light receiving sensitivity and the frequency characteristic will be improved. Furthermore, since the separation of bipolar elements will be conducted by P<-> epitaxial layer, the efficiency in density control at the time of P<-> type epitaxial growth can be improved. <IMAGE>
申请公布号 EP0778621(A2) 申请公布日期 1997.06.11
申请号 EP19960119553 申请日期 1996.12.05
申请人 SONY CORPORATION 发明人 ARAI, CHIHIRO
分类号 H01L27/144;H01L31/103;(IPC1-7):H01L27/144 主分类号 H01L27/144
代理机构 代理人
主权项
地址
您可能感兴趣的专利