发明名称 OVERLOAD PREVENTION METHOD, DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE USING THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To materialize preventive maintenance by preventing the burning accident of a load device. SOLUTION: This device is composed of a digital counter 1 which detects and outputs the starting number of a motor in a specified time, a twin timer 2 which measures the specified time and after the lapse of the specified time, resets the starting number, an input portion 3 which is electrically connected to the digital counter 1 and the twin timer 2 and can be electrically connected to the auxiliary contact of a motor, and an output portion 4 which is electrically connected to the digital counter 1 and the twin timer 2 and can be electrically connected to an alarm device. When the starting number of the motor in the predetermined time exceeds the previously input set number, a signal informing an overload is output, and when the starting number is less than the set number, the set number is reset and the starting number of motor in the specified time is repeatedly detected.</p>
申请公布号 JPH09144714(A) 申请公布日期 1997.06.03
申请号 JP19950305365 申请日期 1995.11.24
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 MORI AKINORI
分类号 F15B20/00;G05B23/02;H01L21/304;(IPC1-7):F15B20/00 主分类号 F15B20/00
代理机构 代理人
主权项
地址