| 摘要 |
An actuator for tilting the plane of a mounted mirror comprises a substrate having an opening filled with a first metalization; a pair of electrodisplacive members mounted on the substrate, each electrodisplacive member having a side surface in a facing relationship with a second metalization formed therebetween and a grooved surface opposite therefrom with a third metalization formed thereon, the electrodisplacive members further having a polarization selected so that a voltage applied between the second metalization and the third metalization causes one of the electrodisplacive members to vertically expand and the other to vertically contract, thereby tilting the plane of the mounted mirror; a metal layer having predetermined dimensions, provided underneath the second metalization; and an electrically conductive adhesive paste layer disposed between the metal layer and the first metalization for providing an electrical contact therebetween. The metal layer being provided between the second metalization and the paste layer, such that a possible increase of the contact resistance between the first metalization and thesecond metalization is prevented, rendering the tilting operation of the mounted mirror upon application of such voltage to the first metalization controllable or accurate.
|
