摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generating device with high particle beam utilization factor and strong energy by arranging a particle beam storage device which turns several times charged particle beams sent from a particle beam generating device within a cavity. SOLUTION: Particle beams sent from a particle beam generating device 21 are incident into a cavity 24 whose inside is kept vacuum of a particle beam storage device 23 through an incident device 22. The particle beams are deflected with deflecting magnets 25 in four corners within the cavity, turn several times within the cavity, then are incident into a multilayer target 27 arranged so as to cross the particle beams, and a multiple interference X ray 26 is generated, then introduced into a using place through a guide path 29. Thereby, the same particles can be incident into the multilayer target 27 several times, the utilization efficiency of the particle beam is enhanced, and X ray having a wide energy range can be generated. |