发明名称 |
Composite electronic coatings |
摘要 |
Formation of a composite coating on an electronic substrate comprises: (a) applying a coating compsn. comprising a hydrogen silsesquioxane (HSSO) resin and 1-90 vol.% of refractory fibres onto the substrate; and (b) heating the coated substrate at a temp. sufficient to convert the coating into a ceramic coating. Also claimed are: (1) a substrate coated by the above method; (2) a compsn. comprising HSSO resin and 10-90 vol.% of refractory fibres. |
申请公布号 |
EP0718255(A3) |
申请公布日期 |
1997.04.23 |
申请号 |
EP19950309103 |
申请日期 |
1995.12.14 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
CAMILLETTI, ROBERT C.;HALUSKA, LOREN A.;MICHAEL, KEITH W. |
分类号 |
C01B33/00;C04B41/45;C04B41/50;C04B41/81;C04B41/87;H01L21/31;H01L21/312;H01L21/316;H01L21/56;H01L23/29;H01L23/31;(IPC1-7):C04B41/84;H01L21/314 |
主分类号 |
C01B33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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