发明名称 |
Semiconductor device with a contact metallization comprising aluminium and silicon and method of manufacturing this semiconductor device |
摘要 |
<p>The invention relates to a semiconductor device with a monocrystalline silicon body (1) provided with a dielectric layer (2) with contact holes (3) through which the silicon body (1) is contacted with an aluminium metallization. To avoid undesirable separation of silicon, a discontinuous nucleus layer (5) of a metal nobler than silicon is formed on the silicon body (1) in the contact holes (3) preceding the provision of the metallization (4). <IMAGE></p> |
申请公布号 |
EP0494711(B1) |
申请公布日期 |
1997.04.09 |
申请号 |
EP19920200006 |
申请日期 |
1992.01.03 |
申请人 |
PHILIPS ELECTRONICS N.V. |
发明人 |
WOLTERS, ROBERTUS ADRIANUS MARIA;SWART, EDWIN TJIBBE;VAN DER PUTTEN, ANDREAS MARTINUS THEODORUS PAULUS |
分类号 |
H01L21/28;H01L21/285;H01L21/288;H01L21/768;H01L23/532;(IPC1-7):H01L21/288;H01L23/485 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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