发明名称 Semiconductor device with a contact metallization comprising aluminium and silicon and method of manufacturing this semiconductor device
摘要 <p>The invention relates to a semiconductor device with a monocrystalline silicon body (1) provided with a dielectric layer (2) with contact holes (3) through which the silicon body (1) is contacted with an aluminium metallization. To avoid undesirable separation of silicon, a discontinuous nucleus layer (5) of a metal nobler than silicon is formed on the silicon body (1) in the contact holes (3) preceding the provision of the metallization (4). <IMAGE></p>
申请公布号 EP0494711(B1) 申请公布日期 1997.04.09
申请号 EP19920200006 申请日期 1992.01.03
申请人 PHILIPS ELECTRONICS N.V. 发明人 WOLTERS, ROBERTUS ADRIANUS MARIA;SWART, EDWIN TJIBBE;VAN DER PUTTEN, ANDREAS MARTINUS THEODORUS PAULUS
分类号 H01L21/28;H01L21/285;H01L21/288;H01L21/768;H01L23/532;(IPC1-7):H01L21/288;H01L23/485 主分类号 H01L21/28
代理机构 代理人
主权项
地址