发明名称 RESET RELEASING UNIT
摘要 PROBLEM TO BE SOLVED: To enhance the safety by invalidating the emergency reset when a solenoid valve drive switch is not closed. SOLUTION: A current detection circuit 14 detects the state where all solenoid drive switches Q1-Q3 are closed under emergency reset through a current limit resistor 13. When all solenoid drive switches Q1-Q3 are not closed, an emergency reset limit circuit 20 is closed thus invalidating an emergency reset signal 19.
申请公布号 JPH0951631(A) 申请公布日期 1997.02.18
申请号 JP19950203314 申请日期 1995.08.09
申请人 TOSHIBA CORP 发明人 KURIYAMA HIROSHI
分类号 C23C16/44;H01L21/205;H02H11/00 主分类号 C23C16/44
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