发明名称 CONNECTION STRUCTURE OF SEMICONDUCTOR CHIP AND INTERCONNECTION SUBSTRATE THEREFOR
摘要 PROBLEM TO BE SOLVED: To ensure a superior connection reliability even for a thin semiconductor chip by connecting the thickness-specified semiconductor chip to an interconnection substrate with adhesives where a plurality of dummy electrodes exist within a connecting region in the form of circular or a polygonal shape as their connecting face is projected. SOLUTION: Dummy electrodes 6 are formed on a connecting face of a substrate 4 within a region surrounded with marginal electrodes 2 on a semiconductor chip 1 when the chip 1 is projected after connection. The electrodes 6 exist in blocks of several electrodes in the form of a circular or polygonal shape as the connecting face is projected. If the chip 1 of 0.3mm or less thick is pressed or hot pressed through an adhesive agent 11 between the chip and interconnection substrate, the chip will not warp, thus greatly improving the connection reliability.
申请公布号 JPH0945731(A) 申请公布日期 1997.02.14
申请号 JP19960122888 申请日期 1996.05.17
申请人 HITACHI CHEM CO LTD 发明人 TSUKAGOSHI ISAO;HIROZAWA YUKIHISA;MATSUOKA HIROSHI;DOKOCHI HISASHI;MIKAMI YOSHIKATSU
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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