BASE MATERIAL FOR EQUIPMENT, ITS PRODUCTION AND EQUIPMENT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To form an electric insulating layer having thermally and mechanically high strength and corrosion resistance, made of a thin film having good adhesion property to a substrate, on the surface of a conductive substrate. SOLUTION: An oxide layer 2 comprising crystalline rutile-type TiO2 on the surface of a titanium substrate 1 by heating at 800-930 deg.C. The layer is preferably formed to 35-120μm thickness.