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经营范围
发明名称
Röntgenstrahllithographie mit ringförmigem Bildfeld
摘要
申请公布号
DE69122018(T2)
申请公布日期
1997.02.06
申请号
DE19916022018T
申请日期
1991.10.02
申请人
AT & T CORP., NEW YORK, N.Y., US
发明人
JEWELL, TANYA E., BRIDGEWATER, NEW JERSEY 08807, US;THOMPSON, KEVIN, LA CANADA, CALIFORNIA 91011, US
分类号
G02B17/06;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G02B17/06
主分类号
G02B17/06
代理机构
代理人
主权项
地址
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