WIRE REEL DRIVE STRUCTURE OF WIRE SAW

摘要

PROBLEM TO BE SOLVED: To shorten the acceleration and deceleration time and improve throughput by forming a wire reel into a hollow state, fitting an outer rotor type motor into the wire reel, and fixing the outer rotor part of the motor to the reel. SOLUTION: A semiconductor ingot is cut into a thin-plate-shaped wafer by a wire saw by the aid of the lapping work of working liquid supplied to wire trains running at high speed while being wound around a wire reel 12 after the ingot is pressed against the trains. An outer rotor type motor 28 driving the reel 12 fixed onto a housing 74 has a fixed shaft 66 being the stator thereof on a horizontal part 62B of a reel bracket 62. In the vicinity of lower end on the shaft 66, bearings 70, 72 supporting the housing 74 being the outer rotor part are disposed. The housing 14 rotates around the shaft 66 through current supply to an armature coil 78.