| 摘要 |
<p>PURPOSE: To obtain a magnetic levitation type stage which enables rapid driving of a moving stage and highly accurate positioning and can be used even in vacuum by adopting a method including providing of a moving stage with movement force and rotary force due to repulsion force and attraction force between a magnet group and an electromagnet group. CONSTITUTION: When three axes of an orthogonal coordinates system are X, Y, Z and each axis-wise rotation angle is expressed byα,β,θ, the title device has a fixed stage 1 and a moving stage 4 which is driven to an arbitrary position inside an XY plane along the fixed stage 1. The moving stage 4 is provided with movement force in Z-direction and rotation force inα-direction andβ-direction by repulsion force or attraction force between first magnet groups 5a to 5f provided to one of the stages 1, 4 and a first electromagnet group 2 provided to the other thereof. The moving stage 4 is provided with movement force in X-direction and Y-direction and rotation force inθ-direction in magnetic flux generated between the second magnet groups 5b, 5c, 5e provided to one of the stages 1, 4 and a second electromagnet group 2 provided to the other thereof by a transverse current made to flow in an electric wire.</p> |
