Precision fluid head transport

摘要

A fluid treatment apparatus, including a lower substrate transportation and fluid head including a plurality of lower drive rod members provided in a plurality of spaced apart lower drive rod member receiving passages. The lower drive rod members at least partially extend through an upper surface of the lower substrate transportation and fluid head. A plurality of fluid injector passages and fluid drain passages are provided between the lower drive rod members. An upper substrate transportation and fluid head is provided including a plurality of upper drive rod members provided in a plurality of spaced apart drive upper rod member receiving passages. The upper drive rod members at least partially extending through a lower surface of the upper substrate transportation and fluid head. A plurality of fluid injector passages and fluid drain passages are provided between the upper drive rod members. A fluid supply apparatus supplies fluid to the fluid injector passages. A fluid source supplies fluid to the fluid treatment apparatus.