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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH08325739(A)
申请公布日期
1996.12.10
申请号
JP19950155153
申请日期
1995.05.30
申请人
ANELVA CORP
发明人
TAKAGI KENICHI
分类号
H05H1/46;C23C16/50;C23C16/507;H01J37/32;(IPC1-7):C23C16/50
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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