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发明名称
BESOI WAFER AND PROCESS FOR STRIPPING OUTER EDGE THEREOF
摘要
申请公布号
EP0744082(A1)
申请公布日期
1996.11.27
申请号
EP19950941409
申请日期
1995.11.16
申请人
SIBOND, L.L.C.
发明人
GOLLAND, DAVID, I.;CRAVEN, ROBERT, A.;BARTRAM, RONALD, D.
分类号
H01L21/304;H01L21/02;H01L21/762;H01L27/12;(IPC1-7):H01L21/20;H01L21/461;H01L27/01
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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