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发明名称
PLASMA TREATMENT EQUIPMENT AND PLASMA TREATMENT METHOD
摘要
申请公布号
JPH08306633(A)
申请公布日期
1996.11.22
申请号
JP19950136001
申请日期
1995.05.10
申请人
ANELVA CORP
发明人
DOI HIROSHI
分类号
H05H1/46;C23C16/44;C23C16/50;C23C16/507;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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