发明名称 WIRE BONDER AND BONDING METHOD
摘要 PURPOSE: To obtain a wire bonder and a bonding method for bonding a wire between an electrode formed on a semiconductor chip and a lead terminal arranged on the outside of the semiconductor chip in which the loop of the bonding wire can be shaped correctly in the vertical and lateral directions. CONSTITUTION: A wire connected, at the forward end thereof, with an electrode is led to a lead terminal 4 through a pectinate groove made in a protrusion 24 provided between a semiconductor chip 1 and the lead terminal 4. The shape of the wire loop is corrected by means of the pectinate groove made in the protruding part of a loop correction metal operating toward the wire from below the semiconductor chip 1.
申请公布号 JPH08288329(A) 申请公布日期 1996.11.01
申请号 JP19950095352 申请日期 1995.04.20
申请人 FUJITSU LTD;FUJITSU VLSI LTD 发明人 MURATA AKIHIKO
分类号 H01L21/60 主分类号 H01L21/60
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