| 摘要 |
PROBLEM TO BE SOLVED: To provide a support having no dielectric breakdown by forming a waveform insulator rod provided with a discontinuous film of a conducive material having the low secondary electron emission factor on a device provided with an electrode, sticking the rod to the electrode, cutting it, and providing a waveform support. SOLUTION: An electrode 21 is selectively added to a waveform rod 20 by precipation at the tilt angle. The precipitation is limited to a ridge line part of the waveform rod by the precipitation of a line-of-shaft of a coating material. Next, metal of the lowδmax or compounds are directly precipitated or precursor containing the material is precipitated first and decomposed in the later stage. After that hating treatment is performed under the hydrogen contained atmosphere. Finally, a wire is cut into the desired length of a support and assembled between a cathode and an anode of a field emission device. The ends of the rods are stuck to the electron emission cathode. Adhesive spot 27 is applied to the projecting ends to connect the rod 20 to the electrode 21, cutting is performed, and a waveform support is manufactured.
|
