| 摘要 |
PURPOSE: To obtain a magneto-optical recording medium having high S/N and high performance by using a flat substrate or ground surface film, furthermore, laminating a recording film of an optimum compsn. with which an increase in noises when recording is small or forming particles in contact with the recording film. CONSTITUTION: A first dielectric film 2 is formed on the disk-shaped substrate 1 and the recording film 3 is formed thereon. A second dielectric film 4 is formed thereon, a reflection film 5 thereon and a protective film 6 thereon. The first and second dielectric films 2, 4 are formed of silicon nitride films. The thickness of the first dielectric film 2 is specified to 85nm and the thickness of the second dielectric film 4 to 20nm. The recording film 3 is formed by sputtering a TbFeCo alloy and laminating Tb23 Fe65 Co12 (at.%) at 25nm by using argon 3mTorr as a sputtering gas. The reflection film 5 is formed by forming an AL film to a film thickness of 40nm, using Al for a target and Ar for a discharge gas, respectively, and specifying the pressure of the discharge gas to 10mTorr. Furthermore, a UV curing resin is formed as the protective film 6. The surface roughness on the recording film 3 side of the dielectric films 2, 4 is specified to 0.26 to 0.48nm.
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