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发明名称
LEAK NOZZLE OF LOAD LOCK CHAMBER
摘要
申请公布号
JPH08195349(A)
申请公布日期
1996.07.30
申请号
JP19950004114
申请日期
1995.01.13
申请人
KOKUSAI ELECTRIC CO LTD
发明人
OKUNO ATSUSHI
分类号
C23C16/44;C23C16/455;H01L21/22;(IPC1-7):H01L21/22
主分类号
C23C16/44
代理机构
代理人
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地址
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