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发明名称
INTERFEROMETRIC METHOD AND APPARATUS TO MEASURE SURFACE TOPOGRAPHY
摘要
申请公布号
EP0722558(A1)
申请公布日期
1996.07.24
申请号
EP19940924018
申请日期
1994.07.25
申请人
ZYGO CORPORATION
发明人
BIEGEN, JAMES, F.
分类号
G01B9/02;G01B9/04;G01B11/24;G01B11/30;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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