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发明名称
SCANNING OPTICAL DEVICE
摘要
申请公布号
JPH08159717(A)
申请公布日期
1996.06.21
申请号
JP19940323924
申请日期
1994.12.01
申请人
NIKON CORP
发明人
KATO KINYA;KATO MASANORI
分类号
G01B11/00;G02B26/10;G03F7/20;(IPC1-7):G01B11/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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