发明名称 Global planarization process using patterned oxide
摘要 A method for planarizing the surface of a layer in a semiconductor device includes forming conductor regions 24, 26, and 28 on a layer of the semiconductor device; forming first insulator regions 30, 32, and 34 in gaps between the conductor regions 24, 26, and 28; and forming an insulator layer 40 over the first insulator regions 30, 32, and 34, and over the conductor regions 24, 26, and 28 such that a surface of the insulator layer 40 will be substantially planar.
申请公布号 US5508233(A) 申请公布日期 1996.04.16
申请号 US19940329021 申请日期 1994.10.25
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 YOST, DENNIS J.;MARTIN, PATRICK M.
分类号 H01L21/3105;H01L21/768;(IPC1-7):H01L21/465 主分类号 H01L21/3105
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