发明名称 |
Directional atomic force microscope and method of observing a sample with the microscope |
摘要 |
An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.
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申请公布号 |
US5503010(A) |
申请公布日期 |
1996.04.02 |
申请号 |
US19940338179 |
申请日期 |
1994.11.09 |
申请人 |
AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY;MINISTRY OF INTERNATIONAL TRADE & INDUSTRY |
发明人 |
YAMANAKA, KAZUSHI |
分类号 |
G01B21/30;G01B5/28;G01N37/00;G01Q10/06;G01Q30/04;G01Q60/24;G01Q60/26;G01Q60/28;G01Q60/32;G01Q60/34;H01J37/28;(IPC1-7):G01B5/28 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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