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发明名称
摘要
申请公布号
JPH0828480(B2)
申请公布日期
1996.03.21
申请号
JP19830182069
申请日期
1983.09.30
申请人
发明人
分类号
H01L27/08;H01L21/82;H01L21/8234;H01L27/088;H01L27/092;H01L27/118;(IPC1-7):H01L27/118
主分类号
H01L27/08
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代理人
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