| 摘要 |
PURPOSE:To enable a wire bonding operation to be monitored in real time by a method wherein an impedance detector which detects impedance basing on the operating voltage and current of an ultrasonic wave generator, an AD converter, and a discriminating circuit are provided. CONSTITUTION:A wire bonding device 10 is equipped with an ultrasonic wave generating device 12 and a capillary 11 connected to it, wherein an impedance detector which detects impedance basing on the operating voltage and current of the ultrasonic wave generating device 12 is provided. An AD converter 13 is provided to convert analog output signals outputted from the impedance detector corresponding to impedance into digital signals. Furthermore, a discriminating circuit 14 is provided, which outputs an alarm signal on a comparison between the digital signal of the AD converter 13 and a previously set reference value when it is found that the digital signal deviates from the reference value. |
