发明名称 |
Support device |
摘要 |
A supporting device for supporting a member having an inside movable portion includes a main frame, a supporting reference plate on which the member is to be placed and a plurality of driving mechanisms each being disposed between the main frame and the supporting reference plate and each having a high-rigidity displacement providing element and a low-rigidity supporting element of low damping factor, disposed in series.
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申请公布号 |
US5467720(A) |
申请公布日期 |
1995.11.21 |
申请号 |
US19940328390 |
申请日期 |
1994.10.24 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KORENAGA, NOBUSHIGE;IWAMOTO, KAZUNORI |
分类号 |
G03F7/20;G05D19/00;H01L21/027;H01L21/30;H01L21/677;H01L21/687;(IPC1-7):A47B85/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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