| 摘要 |
PURPOSE:To obtain a simplified working house for a clean room, which prevents contamination in the clean room due to foreign matters generated from a dust generating source, by isolating the dust generating source in the maintenance, or in replacing medical solution. CONSTITUTION:A working case 14 is constituted of a hollow bellows type isolating screen 11, formed so as to have a rectangular section and free of elongation/contraction into up-and-down direction through pleats type folds 11a, and a ULPA filter 12, provided so as to cover the upper surface of the isolating screen 11. An air discharging unit 16 and a foreign matter counter 17 are attached to the working case 14. The isolating screen 11 is elongated and the working case 14 is arranged so as to cover an inspection device 2 and the foreign matter P, generated from the inspection device 2, is discharged by a discharging unit 16 to prevent contamination in the clean room 1 due to the foreign matter P. |
