| 摘要 |
PURPOSE:To efficiently and rapidly perform an ultrasonic inspection even when a special array probe having many array vibrators is not used. CONSTITUTION:An object 50 to be inspected is rotated and, during one rotation of the object 50 to be inspected, an array probe is moved in a radius direction by the distance equal to the sum of a linear scanning range L and a scanning pitch in linear scanning. As a result, the locus of the position of the linear scanning range itself on the surface of the object 50 to be inspected in the rotary direction draws a spiral pattern. During this operation, the linear scanning due to the array probe is successively executed at scanning positions S1-S6n. When the center-of-rotation part of the object 50 to be inspected is also a scanning object, the linear scanning range L is gradually reduced corresponding to an angle of rotation in one rotation of the center-of-rotation part. |
