申请人 |
ANELVA CORP., FUCHU, TOKIO/TOKYO, JP;NEC CORP., TOKIO/TOKYO, JP |
发明人 |
AKETAGAWA, KEN-ICHI C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;SAKAI, JUNRO C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;MURAKAMI, SHUN-ICHI C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;MUROTA, HIROYOSHI C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;TATSUMI, TORU, MINATO-KU TOKYO, JP |