发明名称 SEMICONDUCTOR MEMORY AND MANUFACTURE THEREOF
摘要 PURPOSE: To provide a semiconductor memory device comprising a capacitor of large capacitance, relating to the improvement of capacitor space in a cylinder structure. CONSTITUTION: A cylindrical lower electrode 16 wherein a storage node of a charge storage capacitor is formed to either of source or drain region through an insulating layer 14 above a transfer transistor, and a cover-like upper part electrode 19 which is formed on the lower electrode 16 while connected to it, are provided.
申请公布号 JPH07211794(A) 申请公布日期 1995.08.11
申请号 JP19940164835 申请日期 1994.06.24
申请人 ERUJII SEMIKON CO LTD 发明人 YON GON ZON
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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