发明名称 Surface property detection apparatus and method
摘要 Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor.
申请公布号 US5440238(A) 申请公布日期 1995.08.08
申请号 US19920948535 申请日期 1992.09.21
申请人 SANDIA CORPORATION 发明人 MARTENS, JON S.;GINLEY, DAVID S.;HIETALA, VINCENT M.;SORENSEN, NEIL R.
分类号 G01R27/06;(IPC1-7):G01N22/00 主分类号 G01R27/06
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