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经营范围
发明名称
Electron optical measurement apparatus.
摘要
申请公布号
EP0456219(B1)
申请公布日期
1995.08.02
申请号
EP19910107494
申请日期
1991.05.08
申请人
HITACHI, LTD.
发明人
OSAKABE, NOBUYUKI;ENDO, JUNJI;TONOMURA, AKIRA;TOMITA, MASAHIRO;FURUTSU, TADAO
分类号
H01J37/141;H01J37/147;H01J37/20;H01J37/26;(IPC1-7):H01J37/26
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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