| 摘要 |
PURPOSE:To make one piezoelectric element multifunctional. CONSTITUTION:A first region which has been polarization treated in the thickness direction in order to detect a bend vibration and a second region which has been polarization treated in the circumferential direction in order to detect, e.g. a twist vibration are formed in one piezoelectric element. Temporary electrodes which are faced on the surface and the rear are set to the same potential, a potential difference is given across adjacent temporary electrodes, temporary electrodes 8-1, 8-3 are grounded, and a positive voltage +V is applied across temporary electrodes 8-2, 8-4. Thereby, a twist strain which generates a clockwise slip and a counterclockwise slip between the temporary electrodes as shown by arrows is generated in a piezoelectric element 3, and a polarization treatment for twist is finished. Then,a positive-polarity voltage +V is applied across electrodes 8-6, 8-7 on the surface side and electrodes 8-5, 8-8 on the rear side, and other electrodes are set to a ground potential. Thereby, a polarization treatment is executed in the face outer direction as shown by arrows. |
