Ultrasonic motor and ultrasonic motor control method

摘要

An ultrasonic motor comprising vibrating body, piezoelectric body for exciting an elastic travelling wave in the vibrating body and moving body driven by the elastic travelling wave provides plural vibration amplitude detection electrodes for detecting an amplitude of vibration of the vibrating body these output signals from which are utilized to identify the magnitude of vibration amplitude of the vibrating body and the ultrasonic motor is controlled using the magnitude of vibration amplitude as a control index.