发明名称 SCANNING-TYPE NEAR-FIELD INTERATOMIC FORCE MICROSCOPE, PROBE USED IN THE MICROSCOPE, AND MANUFACTURE OF THE PROBE
摘要 PURPOSE:To obtain a probe for a scanning-type near-field interatomic force microscope which is easy to manufacture and has a good reproducibility of shape, by using a light transmissible medium having a through-hole at an end part thereof to pass light, and forming the through-hole part to be a sharp acute end. CONSTITUTION:An optical fiber 1 as a light transmissible body consists of a core part 2 propagating light and a clad part 3 of a different index of refraction. A sharpened front end of the optical fiber 1 is formed like a hook. The hook-like part of a sharpened probe 4 is mechanically ground to form a light- reflecting surface 5. A light-reflecting body is set at a rear side of the probe 4 when seen from the front end of the probe 4. Another spring element is not used in this probe, but the resilience of the light transmissible body itself is utilized as a spring element. Therefore, the probe 4 is simplified in structure, with reduced irregularities of characteristics which would result from irregularities of a mounting state of the probe to another spring element, thereby properties, e.g. resonant frequency, Q value and the like are uniformized.
申请公布号 JPH07174542(A) 申请公布日期 1995.07.14
申请号 JP19940052248 申请日期 1994.03.23
申请人 SEIKO INSTR INC 发明人 MURAMATSU HIROSHI;CHIBA TOKUO;ATAKA TATSUAKI;FUJIHIRA MASAMICHI
分类号 G01B11/30;G01B7/34;G01B11/14;G01B11/24;G01N37/00;G01Q60/06;G01Q60/18;G01Q60/22;G01Q60/38;G01Q70/10;G02B6/24;G02B21/00;H01J37/28;(IPC1-7):G01B11/30 主分类号 G01B11/30
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