| 摘要 |
<p>PURPOSE:To enable a substrate support device to be enhanced in gas sealing properties and lessened in size by a method wherein a gas port of a vertical drive gas source through which drive gas is fed/exhausted is provided to a tube on a side opposite to a piston spring side. CONSTITUTION:A piston 10 is fitted into a cylindrical tube 13 in a freely slidable manner. The piston 10 is energized always to move downwards by a spring 11 which has a force not enough to actuate the piston 10 even if a processing chamber 5 is vacuous. When a substrate 7 is in a loading or unloading state, it is placed on a substrate support pad 6 lifted by the pressure of N2 gas or air supplied through a gas port 14, and when the substrate 7 is in a processing state, the supply of gas to the gas port 14 is stopped, and the tube 13 is exhausted to an initial gas pressure, whereby the piston 10 is made to descend by the force of the spring 11, and the substrate 7 is placed on a substrate mounting electrode 1.</p> |
