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经营范围
发明名称
An exposure apparatus.
摘要
申请公布号
EP0358521(B1)
申请公布日期
1995.06.07
申请号
EP19890309117
申请日期
1989.09.08
申请人
CANON KABUSHIKI KAISHA
发明人
MIZUSAWA, NOBUTOSHI;EBINUMA, RYUICHI;KARIYA, TAKAO;UZAWA, SHUNICHI;SHIMODA, ISAMU
分类号
G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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