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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH07142738(A)
申请公布日期
1995.06.02
申请号
JP19930290858
申请日期
1993.11.19
申请人
FUJITSU LTD
发明人
SUGII TOSHIHIRO
分类号
H01L27/12;H01L21/02;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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