Removal of perfluorocarbons from gas streams

摘要

Perfluorocarbons are recovered from gas streams by subjecting the gas stream to an adsorption process in a bed of one or more energetically homogeneous adsorbents such as silicon-rich adsorbents of the FAU structure, silicon-rich adsorbents of the BEA structure, silicon-rich adsorbents of the MOR structure. The adsorption process is preferably pressure swing adsorption or temperature swing adsorption.