Device for controlling and measuring the reflection angle in optical devices by using positively driven elements and linear positioning instrument

摘要

The invention relates to a device for controlling and measuring the reflection angle on a sample (7) or on gratings or prisms in optical devices such as monochromators, ellipsometers, surface-plasmon and reflection spectrometers on the basis of a linear positioning system and a path-length measuring system (3) by using positively driven elements (4, 8) on at least three pivots (1a, 5, 9) and connecting rods for simultaneous adjustment and measurement of the angle of incidence and the angle of reflection of a reflected beam. It is characterised by the linearity of the displacement instrument for adjusting either the two pivots (1a and 9) relative to each other or of the displacement instrument for moving the pivot (5) relative to pivots (1a and 9). <IMAGE>