| 摘要 |
An apparatus and method for measuring the current distribution in an integrated circuit (29) with high time resolution is described incorporating a magneto-optic film (28), a linearly polarized light beam (26) and a means for measuring the magneto-optic polarization rotation of a light beam (54) and circuitry for synchronizing test pulses in an integrated circuit. The invention overcomes the problem of determining current distribution as a function of time and location in an integrated circuit with 1 psec time resolution and 1 micrometer spatial resolution. <IMAGE> |
