| 摘要 |
<p>Furnace having heating and cooling zones operating with controlled atmos. has a perforated container filled with a moisture - absorbent (e.g. silica gel) installed in the cooling zone. As the absorbent becomes satd. with moisture its absorbing capacity diminishes and to restore to its former condition an inert gas is fed into the perforated container to dehydrate the absorbent. Useful in mfr. of semiconductor devices, e.g. for precision heat treatment of components or growth of single crystals.</p> |
